The subject of research of Surface Physics Laboratory of Department of Atomic Physics are applied materials science research/investigations, examination of functional materials, developing advanced measurement technologies, measurement methods and equipments. Main research areas are: Quantum mechanical calculation of the properties and behavior of defects and surfaces in solids, investigation of surface compositions by secondary ion mass spectroscopy (SIMS), Auger electron spectroscopy (AES, SAM ), and X-ray photoemission spectroscopy (XPS), in situ plasma diagnostics and gas analysis by QMS (IBMS), application oriented experimental and theoretical study of wide band gap materials (CVD-diamond, SiC), study of gas sensing behavior of semiconducting oxides, oxidation behaviour of new anode materials for solid electrolyte capacitors, corrosion and contamination studies in discharge lamps. Our research also covers the following directions: experimental and theoretcial investigation of heat transfer in practical plasmas, experimental and theoretical studies of functional glass coatings, design of quadrupole mass filters, secondary ion mass spectrometers (SIMS), and gas chromatography/mass spectrometry (GC/MS), design of Ion and Electron Optics, software for data acquisition and evaluation, control, image processing, semiconductor measurement techniques.