Course title:
Advanced Micro and Nanoscale Material Processing and Analysis Techniques
Primary programme:
Fizikus mérnök BSc
ECTS credits:
3
Course type:
elective
Number of lectures per week:
2
Number of practices per week:
0
Number of laboratory exercises per week:
0
Further knowledge transfer methods:
Lab visit
Grading:
Coursework grade
Special grading methods:
Semester:
6
Prerequisites:
Modern Physics
Responsible lecturer:
Dr. Olga Krafcsik, associate professor, PhD
Lecturers and instructors:
Course description:
This course introduces novel micro and nanoscale material processing and analysis techniques to students.
Definition of microtechnology, nanotechnology and molecular nanotechnology, their comparison and interrelation. Technological conditions. Micro- and nanophysics. Thin layer deposition methods: physical (vacuum evaporation, laser ablation evaporation, molecular beam epitaxy, sputtering).
Doping (diffusion, ion implantation). Lithography (photo, X-ray, electron beam, ion beam).
Layer removing technologies: wet (chemical) etching, dry (plasma, ion beam) etching.
Layer characterisation methods: X-ray diffraction, transmission electron microscopy, scanning electron microscopy, secondary ion mass spectrometry, X-ray photoelectron spectroscopy, Auger electron microscopy, scanning tunneling microscopy, atomic force microscopy.
Conventional electronic devices: bipolar transistor, field effect transistor.
Thick layer technology: screen printing, burning, thick layer pastes.
Nanometer devices: single electron devices, resonant tunnel effect devices, micro-electromechanical systems, sensors, image detectors, displays.
Reading materials:
Hans H. Gatzen, Volker Saile, Jürg Leuthold, Micro and Nano Fabrication (Springer, 2015) e-ISBN: 978-3-662-44395-8
Harmut Frey, Hamid R. Khan, Handbook of Thin Film Technology (Springer, 2015) ISBN 978-3-642-05430-3
Bharat Bhushan, Handbook of Nanotechnology, 4th Edition (Springer, 2017) e-ISBN: 978-3-662-54357-3
Nanoelectronics and information technology, Wiley-VCH, 2003
List of competences:
Please find the detailed list, as quoted from the Hungarian training and outcome requirements of the Physicist Engineer program, in the Hungarian version of the course description.